Tris(dimethylamino)silane
$2,975.27
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Purity: packaged for use in deposition systems
Synonym(s): Tris(dimethylamino)silane, (Me₂N)₃SiH, N, N, N′, N′, N′′, N′′-Hexamethylsilanetriamine, TDMAS, Tris(dimethylamido)silane, N, N, N′, N′, N′′, N′′-Hexamethylsilanetriamine
Formula: ((CH3)2N)3SiH Molecular Weight: 161.32
CAS Number: 15112-89-7 PubChem CID: 6335325
Product description
Properties
Shelf life: 1095 days
Solubility:
Sensitivity:
Boiling point: 142 °C
Melting point: −90 °C
InChl: InChI=1S/C6H18N3Si/c1-7(2)10(8(3)4)9(5)6/h1-6H3
Safety Information
Pictograms:
Signal Word: Danger
Hazard Statements: H311; H314; H302; H225; H330; H261
Precautionary Statements: P280; P231+P232; P370+P378; P210; P403+P235; P402+P404
WGK: 3
Storage:
Personal Protective Equipment: Faceshields， full-face respirator (US)， Gloves， Goggles， multi-purpose combination respirator cartridge (US)， type ABEK (EN14387) respirator filter
Additional information
| Pack size | 25g |
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